Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1997-03-17
1998-09-08
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
Of surface reflection
250225, G01N 2121
Patent
active
058052852
ABSTRACT:
Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.
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Green Steven E.
He Ping
Johs Blaine D.
Pittal Shakil A.
Woollam John A.
J.A. Woollam Co. Inc.
Pham Hoa Q.
Welch James D.
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