Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1995-09-20
1997-09-09
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
Of surface reflection
250225, G01N 2121
Patent
active
056662017
ABSTRACT:
Disclosed is a dispersive optics system, in the context of ellipsometer or polarimeter and the like systems, which, in use, produces a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders.
REFERENCES:
patent: 4030835 (1977-06-01), Firester et al.
patent: 4158506 (1979-06-01), Collett
patent: 4200396 (1980-04-01), Kleinknecht et al.
patent: 4236823 (1980-12-01), Roach et al.
patent: 4541716 (1985-09-01), Crooks et al.
patent: 4681450 (1987-07-01), Azzam
patent: 4725145 (1988-02-01), Azzam
patent: 5081348 (1992-01-01), Siddiqui
patent: 5102222 (1992-04-01), Berger et al.
patent: 5337146 (1994-08-01), Azzam
patent: 5373359 (1994-12-01), Woollam et al.
patent: 5504582 (1996-04-01), Johs et al.
patent: 5521706 (1996-05-01), Green et al.
Division-of-Amplitude Photopolarimeter based on conical diffraction from a metallic grating, Applied Options, vol. 31, No 19, 1, Jan. 13, 1992, 277 and pp. 424-431 HECHT, "OPTICS", 2nd Ed. Addison-Wesley, 1987.
Green Steven E.
He Ping
Johs Blaine D.
Pittal Shakil A.
Woollam John A.
J.A. Woollam Co. Inc.
Pham Hoa Q.
Welch James D.
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