Multiple metal-insulator-metal capacitors and method of...

Details Multiple metal-insulator-metal capacitors and method of... Multiple metal-insulator-metal capacitors and method of...

2006-01-30

2009-11-24

Ha, Nguyen T (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S303000, C361S321100, C361S311000, C361S328000, C361S330000, C438S239000, C438S240000, C438S253000, C438S256000

Reexamination Certificate

active

07623338

ABSTRACT:
In a device including multiple metal-insulator-metal (MIM) capacitors and a method of fabricating the same, the multiple MIM capacitors comprise a lower interconnect in a substrate; a first dielectric layer on the lower interconnect; a first intermediate electrode pattern on the first dielectric layer overlapping with the lower interconnect; a second intermediate electrode pattern on the first dielectric layer and spaced apart from the first intermediate electrode pattern in a same plane of the device as the first intermediate electrode pattern; a second dielectric pattern on the second intermediate electrode pattern; and an upper electrode pattern on the second dielectric pattern.

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