Multiple loadlock system

Details Multiple loadlock system Multiple loadlock system

1997-07-28

2000-03-07

Niebling, John F.

Semiconductor device manufacturing: process

Continuous processing

438908, 438758, H01L 2131, H01L 21469

Patent

active

060340002

ABSTRACT:
A semiconductor processing system having a holding chamber coupled to a mainframe processing system and at least one loadlock chamber coupled to the holding chamber in which unprocessed wafers are transferred from the loadlock chamber to the holding chamber for subsequent processing by the mainframe system.

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