Multiple layer strain gauge

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – By loading of specimen

Reexamination Certificate

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C073S777000, C257S619000

Reexamination Certificate

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07938016

ABSTRACT:
An apparatus and method uses a die having at least one perimeter side with multiple pads. A structure is positioned between the at least one perimeter side and the multiple pads having multiple layers within the die. The structure functions as both a strain gauge and a crack stop. The structure arrests cracks from propagating from the at least one perimeter side to an interior of the die and provides an electrical resistance value as a function of an amount of strain existing where the structure is positioned. In another form the structure is implemented on a substrate such as a printed circuit board rather than in a semiconductor die.

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