Multiple device test layout

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324760, 324765, 3241581, G01R 3128

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active

06037795&

ABSTRACT:
A test layout increases the sample size of electromigration experiments. Through pad sharing, the number of structures tested can be increased, allowing hundreds of identical structures to be tested in a single high temperature oven door.

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