Multilayer microtip probe and method

Details Multilayer microtip probe and method Multilayer microtip probe and method

1997-06-30

1999-04-06

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, H01J 3726

Patent

active

058922237

ABSTRACT:
A multilayer microtip probe, and method of manufacture, having a microtip prepared for adhesion of a first overlayer for determining probe operating properties and a hardened protective overlayer for improving resistance to erosion and wear during probe use.

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