Multilayer deposition method for forming Pb-doped Bi-Sr-Ca-Cu-O

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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505742, 505731, 505732, 427 62, 4274192, 4274193, 4271263, B05D 512

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051419173

ABSTRACT:
A perovskite type superconductor film having a high content, almost a single phase, of the high Tc phase is formed by the steps of: depositing at least one first film of a first material (e.g., a composite oxide of Bi-Sr-Ca-Cu-O system or Tl-Ba-Ca-Cu-O system) constituting a perovskite type superconductor over a substrate; depositing at least one second film of a second material containing an oxide or element (Bi.sub.2 O.sub.3, Tl.sub.2 O.sub.3, PbO.sub.x, etc., particularly PbO.sub.x) having a vapor pressure of more than 10 .sup.-4 Pa at 800.degree. C. at least as a main component over the substrate; to thereby form a stack of the first and second films; and heat treating the stack of the first and second films to form the perovskite type superconductor film on the substrate. Further, preferred compositions of the as-deposited films or stack are determined.

REFERENCES:
Lee et al, "Superconducting Tl-Ca-Ba-Cu-O thin films with zero resistance at temperature of up to 120 K", Appl. Phys. lett. 53(4) Jul. 1988 pp. 329-331.
Denhoff et al, "Effects of annealing on TlBaCaCuO thin films", Appl. Phys. lett. 54(7) Feb. 1989 pp. 660-662.
Ichikawa et al, "Highly oriented superconducting Tl-Ca-Ba-Cu oxide thin films with 2-1-2-2 phase", Appl. Phys. lett. 53(10) Sep. 1988 pp 919-921.
Koyama et al "Preparation of Single 110 K Phase of the Bi-Pb-Sr-Ca-Cu-O Superconductor" Jpn. J. Appl. Phys. vol. 27(10) Oct. 1988, L1861-1863.
Takano et al "High-T.sub.c Phase Promoted and Stabilized in the Bi, Pb-Sr-Ca-Cu-O System" Jpn. J. Appl. Phys. vol 27(6) Jun. 1988, L1041-1043.
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Sugise et al "Preparation of Tl.sub.2 Ba.sub.2 Ca.sub.2 Cu.sub.3 O.sub.y Thick Films from Ba-Ca-Cu-O Films" Jpn. J. Appl. Phys. vol. 27(12) Dec. 1988 L2314-2316.
Qiu et al "Formation of Tl-Ca-Ba-Cu-O films by diffusion of Tl into rf-sputted Ca-Ba-Cu-O" Appl. Phys. lett. 53(12) Sep. 1988 pp. 1122-1124.
Shih et al "Multilayer deposition of Tl-Ba-Ca-Cu-O films" Appl. Phys. lett 53(6) Aug. 1988 pp. 523-525.
Sheng et al"Tl.sub.2 O.sub.3 Vapor process of making Tl-Ba-Ca-Cu-O superconductors" Appl. Phys. lett. 53(26) Dec. 1988 pp. 2686-2688.
Paserin et al "Vacuum deposition of multilayer Bi-Ca-Sr-Cu-O superconducting thin films" Appl. Phys. Lett. 53(7) Aug. 1988. pp. 624-625.
Kuroda et al "Preparation of New high-T.sub.c Superconducting Oxide Bi-Sr-Ca-Cu-O Thin Film by Electron Beam Deposition Technique" Jpn. J. Appl. Phys. vol. 27(4) Apr. 1988 L625-627.
Chemical & Engineering News, vol. 66, no. 20, May 16, 1988, pp. 24-29, Washington, DC, US; R. Dagani: "New class of superconductors pushing temperatures higher".
Applied Physics Letters, vol. 53, no. 18, Oct. 31, 1988, pp. 1759-1761, American Institute of Physics, New York, NY, US; R. Ramesh et al. "Microstructure of Pb-modified Bi-Ca-Sr-Cu-O superconductor" p. 1759.
Nature, vol. 332, Mar. 10, 1988, p. 138; Z. Z. Sheng et al. "Bulk superconductivity at 120 K in the Tl-Ca/Ba-Cu-O system".

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