Multifunctional photolithographic compositions

Details Multifunctional photolithographic compositions Multifunctional photolithographic compositions

1990-12-13

1992-05-05

Hamilton, Cynthia

Radiation imagery chemistry: process, composition, or product th

Imaged product

Multilayer

430 18, 430271, 430323, 430313, G03F 730, G03F 711

Patent

active

051106973

ABSTRACT:
A photolithographic composition having improved processability and which eliminates the need for inter layering multiple special purpose coatings in the production of micro-electronic devices is surprisingly made possible by selective dissolution of poly(vinylpyridine) and an effective light attenuating material in critical solvents.

REFERENCES:
patent: 2448542 (1948-09-01), McQueen et al.
patent: 2760863 (1956-08-01), Plambeck
patent: 4822718 (1989-04-01), Latham et al.

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