Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Patent
1997-05-22
1999-08-03
Angebranndt, Martin
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
430394, 385132, 385130, 385140, G03G 1502
Patent
active
059323973
ABSTRACT:
Multicolor lithography is described in which the wavelength-dependent variation of light penetration into a photosensitive polymer is used to provide three-dimensional control of the refractive index gradients in the polymer resulting from photo-induced changes in the polymer. This invention provides the first method for three-dimensional index control compared to previous waveguide fabrication technologies which provide primarily two-dimensional control with very limited or no process variation in the third (depth) dimension. This method makes possible the simultaneous fabrication of multiple sizes of single mode buried channel waveguides in a single fabrication with low loss waveguide tapers connecting these channel waveguides. This approach provides large waveguides for efficient coupling to fibers while at the same time providing low loss waveguide taper transitions to small single mode waveguides. These small waveguides are electrically modulated with high efficiency to achieve low electro-optic drive voltages in a small, high speed integrated optic device. Graded-index waveguides for low optical propagation losses are inherent in this invention. Because buried waveguides and waveguide taper structures are optically defined through multicolor lithography, this method of this invention can be applied adaptively to fabricate channel waveguides to interconnect optical components in hybrid opto-electronic circuits and can be applied to passive materials as well as polymer materials with significant optical nonlinearities.
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Angebranndt Martin
RVM Scientific, Inc.
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