Electric resistance heating devices – Heating devices – Radiant heater
Patent
1993-08-10
1994-11-22
Reynolds, Bruce A.
Electric resistance heating devices
Heating devices
Radiant heater
118724, H05B 362, H01L 2100
Patent
active
053676068
ABSTRACT:
A multi-zone illuminator for processing semiconductor wafers is described which comprises a plurality of source lamps and dummy lamps embedded in the reflector side of a lamp housing. The source lamps are arranged in a plurality of concentric circular zones. The illuminator also comprises plurality of light pipes for receiving multi-point temperature sensors to measure the semiconductor wafer temperature and its distribution uniformity. A gold-plated reflector plate is attached to the bottom side of the lamp housing for reflecting and directing optical energy toward the wafer surface. The distance between the reflector plate and the wafer and the lamps and the wafer may be adjusted with the use of a spacial elevator and adaptor assembly. The multi-zone illuminator allows uniform wafer heating during both transient and steady-state wafer heating cycles.
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Davis Cecil J.
Matthews Robert
Moslehi Mehrdad M.
Donaldson Richard L.
Garner Jacqueline J.
Hiller William E.
Jeffery John A.
Reynolds Bruce A.
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