Multi-tone optical mask, method of manufacturing the same...

Details Multi-tone optical mask, method of manufacturing the same... Multi-tone optical mask, method of manufacturing the same...

2007-04-05

2010-12-07

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S311000, C430S322000

Reexamination Certificate

active

07846618

ABSTRACT:
A multi-tone optical mask includes a substrate, a light-blocking pattern, a first semi-transmitting pattern and a second semi-transmitting pattern. The light-blocking pattern is formed on the substrate. The first semi-transmitting pattern is formed on the substrate. The second semi-transmitting pattern partially overlaps the first semi-transmitting pattern. The multi-tone optical mask has at least five different light-transmittances corresponding to a plurality of areas divided on the substrate.

REFERENCES:
patent: 5391441 (1995-02-01), Imai et al.
patent: 6180290 (2001-01-01), Hsu et al.
patent: 2002/0132173 (2002-09-01), Rolfson
patent: 2005/0112478 (2005-05-01), Taravade et al.
patent: 2005/0196683 (2005-09-01), Henke et al.
patent: 2000-0047011 (2000-07-01), None
Korean Patent Abstracts, Publication No. 1020000047011, Jul. 25, 2000, 1 p.

Affiliated with

Also associated with

Rating

Multi-tone optical mask, method of manufacturing the same... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-tone optical mask, method of manufacturing the same..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-tone optical mask, method of manufacturing the same... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4184080