Multi-thermal zone shielding apparatus

Details Multi-thermal zone shielding apparatus Multi-thermal zone shielding apparatus

2006-05-23

2006-05-23

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050000, C118S729000, C118S720000, C118S721000

Reexamination Certificate

active

07049549

ABSTRACT:
A deposition shield partially covering a substrate and having two zones of different thermal properties can provide minimal deposition on the shield together with minimal heat loss due to substrate contact. A zone of low thermal transmittivity is contact shielding the substrate, and due to the low thermal transmittivity property, there is minimal heat loss of the heated substrate, resulting in a more uniform temperature profile and a more uniform film deposition. A zone of high thermal transmittivity is in the rest of the shield, allowing thermal energy from the heated substrate to transmit through, resulting in a cooler shield and minimal deposition on the shield.

REFERENCES:
patent: 4932358 (1990-06-01), Studley et al.
patent: 5304248 (1994-04-01), Cheng et al.
patent: 5965047 (1999-10-01), Blersch et al.
patent: 5991508 (1999-11-01), Ohmine et al.
patent: 6036782 (2000-03-01), Tanaka et al.
patent: 6069135 (2000-05-01), Falk et al.

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