Semiconductor device manufacturing: process – Making passive device
Patent
1998-05-07
2000-12-12
Whitehead, Jr., Carl
Semiconductor device manufacturing: process
Making passive device
438238, H01L 2120
Patent
active
061598178
ABSTRACT:
A thin film spiral inductor is formed on a ceramic or other suitable substrate in a manner which facilitates adjustment of the inductive value of the inductor after its fabrication on the substrate. The thin film inductor comprises a spiral conductive path having a plurality of conductive pads connected at different positions about the periphery of the spiral path. A conductive pad is also located at the center of the spiral path in electrical connection to the inner end of the path. The center pad and a selected one of the peripheral pads serve as terminals of the inductor to provide an intended value of inductance. The unused pads may be severed from the spiral such as by a laser cut before connection of the inductor into a circuit
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Altimari Robert J.
Madden, Jr. Jean D.
Maynard Edward R.
Pitts William E.
Electro-Films Incorporated
Jr. Carl Whitehead
Vockrodt Jeff
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