Multi-stage single-drive FOUP door system

Details Multi-stage single-drive FOUP door system Multi-stage single-drive FOUP door system

1999-03-26

2000-03-28

Kramer, Dean J.

Material or article handling

Device for emptying portable receptacle

With container opening means

414416, 414217, 414937, 414939, 414811, B65G 4907, B65G 4706, H01L 2168

Patent

active

060423242

ABSTRACT:
Two FOUPs are stacked and moved together towards an equipment wall by a horizontal actuator. FOUP doors are withdrawn as a unit by a horizontal actuator, and lowered as a unit by a vertical actuator to provide access to the interior of the FOUPs.

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patent: 5674039 (1997-10-01), Walker et al.
patent: 5795355 (1998-08-01), Moran
patent: 5909994 (1999-06-01), Blum et al.
patent: 5915562 (1999-06-01), Nyseth et al.
patent: 5975825 (1999-11-01), Blattner et al.
patent: 5984610 (1999-11-01), Rush et al.

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