Multi-sectored flat board type showerhead used in CVD apparatus

Fluid sprinkling – spraying – and diffusing – Unitary plural outlet means – Arranged in plural groups or rows

Reexamination Certificate

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Details

C239S590500, C239S566000, C239S568000, C156S345140, C156S345170, C156S345340, C118S715000, C118S719000, C427S248100

Reexamination Certificate

active

07104476

ABSTRACT:
Disclosed is a showerhead of a CVD apparatus comprising a plate having an empty inside and provided with a plurality of injection holes at one surface thereof; and gas supplying pipes installed at the plate so as to supply gas, wherein introduced gas thereto is injected to an upper space of the wafer through the injection holes, the plate is divided in a radial manner on the basis of a center point to be divided into a plurality of sectors having respective inner spaces independently, and the gas supplying pipes are connected to the respective sectors. According to that, gas can be independently supplied to each sector of the showerhead, thereby easily applying the CVD apparatus not only to a batch type process but also to an atomic layer deposition method.

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English translation of Abstract of Korean patent application No. 2000-51046 dated Aug. 16, 2000.
Untranslated Korean Office Action dated Sep. 26, 2003 corresponding to Korean application No. 10-2001-0073337.

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