Multi-planar layout vertical thin-film transistor inverter

Details Multi-planar layout vertical thin-film transistor inverter Multi-planar layout vertical thin-film transistor inverter

2007-06-26

2007-06-26

Booth, Richard A. (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C257SE21411

Reexamination Certificate

active

10862761

ABSTRACT:
A vertical thin-film transistor (V-TFT) inverter circuit and a method for forming a multi-planar layout TFT inverter circuit have been provided. The method comprising: forming a P-channel TFT with a gate, a first source/drain (S/D) region in a first horizontal plane, and a second S/D region in a second horizontal plane, different than the first horizontal plane; and, forming an N-channel TFT, adjacent the P-channel TFT, with a gate, a third S/D region in a third horizontal plane, and a fourth S/D region in the second horizontal plane, different than the third horizontal plane. Forming a P-channel TFT includes forming a P-channel top-drain vertical TFT (TDV-TFT), and forming an N-channel TFT includes forming an N-channel TDV-TFT.

REFERENCES:
patent: 5047360 (1991-09-01), Nicholas
patent: 5340759 (1994-08-01), Hsieh et al.
patent: 6649980 (2003-11-01), Noguchi
patent: 6753239 (2004-06-01), Conn
patent: 6974981 (2005-12-01), Chidambarrao et al.
A Novel Vertical Bottom-Gate Polysilicon Thin Film Transistor with Self-aligned Offset, Lai et al., IEEE Electron Device Letters, vol. 17, No. 5, May 1996, p. 199-201.
A Vertical Submicro Polysilicon Thin-Film Transistor Using a Low Temperature Process, Zhao et al., IEEE Electron Device Letters, vol. 15, No. 10, Oct. 1994, p. 415-417.

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