Multi-pixel and multi-column electron emission inspector

Details Multi-pixel and multi-column electron emission inspector Multi-pixel and multi-column electron emission inspector

2006-11-14

2006-11-14

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000

Reexamination Certificate

active

07135675

ABSTRACT:
One embodiment disclosed pertains to an inspection system for inspecting a specimen. The system includes a plurality of columns for directing a plurality of multi-pixel incident beams onto a plurality of multiple-pixel regions of the specimen. Impingement of said incident beams causes emission of electrons from the regions. The system further includes a plurality of multiple-pixel electron detectors, each said detector configured to detect in parallel electrons emitted from a plurality of pixels in one of the regions, and a plurality of processing sub-systems. Each said sub-system is configured to process data from one of said detectors. Advantageously, throughput for an inspection system in accordance with an embodiment of the invention may be increased by approximately a factor of N, where N is the number of columns in the system.

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