Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate
2006-05-18
2008-12-16
Perrin, Joseph L (Department: 1792)
Cleaning and liquid contact with solids
Apparatus
With plural means for supplying or applying different fluids...
C134S099100, C134S102300, C134S902000
Reexamination Certificate
active
07464719
ABSTRACT:
A substrate preparation apparatus is provided. The apparatus includes a housing configured to be installed in a substrate fabrication facility. The housing includes a manifold for use in preparing a wafer surface. The manifold is configured to include a first process window in a first portion of the manifold. A first fluid meniscus is capable of being defined within the first process windowl. Further included is a second process window in a second portion of the manifold. A second fluid meniscus is capable of being defined within the second process window. An arm is integrated with the housing, and the arm is coupled to the manifold, such that the arm is capable of positioning the manifold in proximity with the substrate during operation. The apparatus therefore provides for the formation of multi-menisci over the surface of a substrate using a single manifold.
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de Larios John
Garcia James P.
Ravkin Mike
Redeker Fred C.
Woods Carl
Lam Research Corporation
Martine Penilla and Gencarella LLP
Perrin Joseph L
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