X-ray or gamma ray systems or devices – Specific application – Telescope or microscope
Patent
1992-07-10
1993-08-24
Porta, David P.
X-ray or gamma ray systems or devices
Specific application
Telescope or microscope
378 84, 378 76, 359586, G21K 106
Patent
active
052395669
ABSTRACT:
For obtaining a high reflectivity, even when the thickness of periodic structure is reduced, in a multi-layered mirror consisting of alternate layers of a first substance showing a larger difference vacuum in the refractive index in the soft X-ray region and a second substance showing a smaller difference, a nickel-chromium alloy containing chromium in at least 5 wt. % is used as the first substance of larger difference. In a preferred form of the mirror, the second substance of smaller difference in refractive index is vanadium oxide.
REFERENCES:
patent: 4684565 (1987-08-01), Abeles et al.
patent: 4785470 (1988-11-01), Wood et al.
patent: 5085926 (1992-02-01), Iida et al.
Murakami Katsuhiko
Nagata Hiroshi
Nakamura Hiroshi
Nikon Corporation
Porta David P.
Wong Don
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