Multi-layer thin film structure and parallel processing method f

Details Multi-layer thin film structure and parallel processing method f Multi-layer thin film structure and parallel processing method f

1991-05-03

1993-11-02

Straub, Gary P.

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428620, 428623, 428632, B32B 1504, H01L 2912

Patent

active

052582361

ABSTRACT:
A method and apparatus for releasing a workpiece from a substrate including providing a substrate which is transparent to a predetermined wavelength of electromagnetic radiation; forming, on the substrate, a separation layer which degrades in response to the predetermined radiation; providing the workpiece on the separation layer; and directing the predetermined radiation at the separation layer through the transparent substrate so as to degrade the separation layer and to separate the workpiece from the substrate.

REFERENCES:
patent: 3970494 (1976-07-01), Pritchard
patent: 4664739 (1987-05-01), Aurichio
patent: 4780177 (1988-10-01), Wojnarowski et al.
patent: 4812191 (1989-03-01), Ho et al

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