Multi-layer source/drain stressor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S200000, C257S616000, C257SE21092, C257SE21102, C257SE21182

Reexamination Certificate

active

07544997

ABSTRACT:
A method for forming a semiconductor device includes forming a recess in a source region and a recess in a drain region of the semiconductor device. The method further includes forming a first semiconductor material layer in the recess in the source region and a second semiconductor material layer in the recess in the drain region, wherein each of the first semiconductor material layer and the second semiconductor material layer are formed using a stressor material having a first ratio of an atomic concentration of a first element and an atomic concentration of a second element, wherein the first element is silicon and a first level of concentration of a doping material. The method further includes forming additional semiconductor material layers overlying the first semiconductor material layer and the second semiconductor material layer that have a different ratio of the atomic concentration of the first element and the second element.

REFERENCES:
patent: 6621131 (2003-09-01), Murthy et al.
patent: 7176481 (2007-02-01), Chen et al.
patent: 2006/0065914 (2006-03-01), Chen et al.
patent: 2006/0134873 (2006-06-01), Koontz
patent: 2007/0004123 (2007-01-01), Bohr et al.
patent: 2007036205 (2007-02-01), None
patent: 2005124837 (2005-12-01), None
PCT Search report and Written Opinion for corresponding PCT Application No. PCT/US08/51841 mailed May 29, 2008.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Multi-layer source/drain stressor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-layer source/drain stressor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-layer source/drain stressor will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4117288

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.