Multi-functioned wafer aligner

Details Multi-functioned wafer aligner Multi-functioned wafer aligner

2005-09-13

2005-09-13

Luu, Thanh X. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C356S237400

Reexamination Certificate

active

06943364

ABSTRACT:
Disclosed is a multi-functioned wafer aligner comprising a multi-functioned unit performing a wafer centering operation, a wafer flat zone alignment, and a wafer damage detection, and a main processor deciding positions of the wafer centering operation and the wafer flat zone alignment, and discriminating wafer damage, such as wafer breakage and wafer crack, by calculating an accumulated digital signal inputted from the multi-functioned unit.

REFERENCES:
patent: 4819167 (1989-04-01), Cheng et al.
patent: 4880348 (1989-11-01), Baker et al.
patent: 5851102 (1998-12-01), Okawa et al.
patent: 6062084 (2000-05-01), Chang et al.
patent: 6298280 (2001-10-01), Bonora et al.
patent: 10-318933 (1998-12-01), None

Affiliated with

Also associated with

Rating

Multi-functioned wafer aligner does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-functioned wafer aligner, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-functioned wafer aligner will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3390355