Multi-face forming mask device for vacuum deposition

Details Multi-face forming mask device for vacuum deposition Multi-face forming mask device for vacuum deposition

2005-05-10

2005-05-10

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Work surface shields, masks or protectors

Work-attached

C118S504000, C118S720000, C118S721000, C156S345300

Reexamination Certificate

active

06890385

ABSTRACT:
A second metal mask (13) having a screen part (13A) provided with a plurality of parallel, fine slits (13a) arranged at very small intervals is placed on a base plate (12) serving also as a first metal mask and provided with a plurality of windows (18) defining regions in which a material is to be deposited. One end of the second metal mask (13) is fastened to the base plate (12) by a mask clamp (20) and the other end of the same is fastened to a slider (23). Resilient force is applied to the slider (23) by compression coil springs (30). Thus, the screen part (13A) of the second metal mask (13) is tensioned and thereby the slits (13a) are stretched straight and are extended at predetermined pitches. A substrate (17) placed on the second mask (13) is subjected to a vacuum evaporation process to form fine patterns on the substrate (17) in a gang-patterning mode.

REFERENCES:
patent: 4915057 (1990-04-01), Boudreau et al.
patent: 6475287 (2002-11-01), Clark
patent: 20020062785 (2002-05-01), Kim et al.
patent: 20030101932 (2003-06-01), Kang
patent: 20030150384 (2003-08-01), Baude et al.
patent: 20030221614 (2003-12-01), Kang et al.
patent: 20040003775 (2004-01-01), Kim
patent: 20040020435 (2004-02-01), Tsuchiya et al.
patent: 2001-018358 (2001-01-01), None
patent: 2001-089840 (2001-04-01), None
patent: 2001-237073 (2001-08-01), None
patent: U 3082805 (2001-10-01), None
patent: 2002-069619 (2002-03-01), None

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