Multi-compartment eletroplating system

Details Multi-compartment eletroplating system Multi-compartment eletroplating system

1993-01-15

1994-05-17

Valentine, Donald R.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204267, 204269, 204273, 204284, 204DIG7, 204270, C25D 1702, C25D 1710, C25D 2110, C25D 2112

Patent

active

053125320

ABSTRACT:
A multi-compartment electroplating system for electroplating two or more objects simultaneously such that the electrodeposited material is substantially uniform in thickness and composition. Electroplating solution is circulated between a reservoir and a multi-compartment tank which has one cathode-paddle-anode (CPA) assembly for each compartment. Each CPA assembly has an anode, a cathode adapted for holding a wafer and employing a single thieving electrode which covers all of the floor of the compartment not covered by the wafer, and a paddle. Also included is a cover which houses a single linear motor for driving all of the paddles in synchrony.

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