Multi-channel semiconductor test system

Details Multi-channel semiconductor test system Multi-channel semiconductor test system

2001-05-18

2004-05-04

Zarneke, David A (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB

Reexamination Certificate

active

06731125

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a multi-channel semiconductor test system and particularly to a multi-channel semiconductor test system capable of differentiating channels of a handler for corresponding dies during testing.
2. Description of the Prior Art
FIG. 1
is a block diagram of a conventional multi-channel semiconductor test system. The system comprises a handler
1
, a testing device
2
and an interface
3
.
The handler
1
comprises an accepter
13
, which accepts a wafer (not shown) having three dies
11
a
,
11
b
and
11
c
to be tested. A display
14
in the handler
1
displays test results of the dies
11
a
, lib and
11
c
read by the handler
1
through channels
15
a
,
15
b
and
15
c.
The testing device
2
comprises three testers
22
a
,
22
b
, and
22
c
, and three test modules
21
a
,
21
b
, and
21
c
, corresponding to the dies
11
a
,
11
b
and
11
c
, respectively. The testers
22
a
,
22
b
and
22
c
control the test modules
21
a
,
21
b
and
21
c
to generate three groups of test signals to the dies
11
a
,
11
b
and
11
c
through buses L
1
, L
2
and L
3
, respectively. Then, the test modules
21
a
,
21
b
and
21
c
derive three groups of testing results through the buses L
1
, L
2
and L
3
, and transfer them to the testers
22
a
,
22
b
and
22
c
, respectively.
The testers
22
a
,
22
b
and
22
c
transfer the received testing results to the interface
3
through buses L
4
, L
5
and L
6
, and then the testing results are input to the channels
15
a
,
15
b
and
15
c
through one bus L
7
.
The conventional test system is subject to having mis-connected buses.
FIG. 2
shows the test system, two buses of which are mis-connected. The buses L
1
and L
2
are inversely connected, i.e. the group of the testing results of the die
11
a
is output to the test module
21
b
and the group of the testing results of the die
11
b
is output to the test module
21
a
. Thus, the testing device
2
transferring the groups of the testing results of the dies
11
a
and lib through the buses L
5
and L
4
, respectively. Consequently, the display
14
displays the testing results of the die
11
a
and
11
b
on the channels
15
b
and
15
a
respectively. An operator will be misled by the display
14
if unaware of the inversely connected buses L
1
and L
2
.
SUMMARY OF THE INVENTION
The object of the present invention is to provide a multi-channel semiconductor test system capable of differentiating channels of a handler for corresponding dies during testing.
To achieve the above-mentioned object, the invention provides a multi-channel semiconductor test system comprising: a handler, a code generator, a testing device and a differentiator. The handler has a plurality of channels for testing a plurality of dies. The code generator generates a plurality of codes corresponding to the channels for the dies. The testing device tests the dies, derives and transfers a plurality of testing results of and together with the corresponding codes for the dies. The differentiator receives the testing results and the codes, and transfers the testing results to the handler through corresponding channels according to the codes.
The invention further provides a multi-channel semiconductor test system for testing dies on a wafer, comprising: a handler, a code generator, a testing device and a differentiator. The handler has a plurality of channels, accepts the wafer and displays a plurality of testing results from the channels. The code generator generates a plurality of codes corresponding to the channels for the dies on the wafer. The testing device tests the dies, derives and transfers the testing results of and together with the corresponding codes for the dies. The differentiator receives the testing results and the codes, and transfers the testing results to the handler through corresponding channels according to the codes.
In the present invention, a code generator and a differentiator are provided to generate codes transferred with testing results, and then to differentiate channels of a handler for corresponding dies under test according to the codes.


REFERENCES:
patent: 2984828 (1961-05-01), Gridley et al.
patent: 3319231 (1967-05-01), Oliver
patent: 4201976 (1980-05-01), Patel
patent: 5794175 (1998-08-01), Conner
patent: 6078188 (2000-06-01), Bannai et al.
patent: 6389525 (2002-05-01), Reichert et al.
patent: 6452411 (2002-09-01), Miller et al.
patent: 6499121 (2002-12-01), Roy et al.
patent: 6541791 (2003-04-01), Chang

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