Multi-chamber installation for treating objects under...

Details Multi-chamber installation for treating objects under... Multi-chamber installation for treating objects under...

2007-01-02

2007-01-02

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

C118S719000, C156S345290, C417S003000, C417S199100, C417S250000, C417S423400, C417S423500, C418S001000, C418S005000, C418S013000

Reexamination Certificate

active

10492033

ABSTRACT:
A multi-chamber installation (1) treats objects under vacuum. An evacuation system (5) is connected to a plurality of chambers (2, 3, 4). To reduce the complexity of the evacuation process, a forepump (5) has several stages (11, 12, 13). Each of said stages is connected to one of the chambers (2, 3, 4).

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