Multi-chamber carrier head with a flexible membrane

Details Multi-chamber carrier head with a flexible membrane Multi-chamber carrier head with a flexible membrane

2006-02-21

2006-02-21

Nguyen, Dung Van (Department: 3723)

Abrading

Machine

Rotary tool

C451S398000

Reexamination Certificate

active

07001257

ABSTRACT:
A carrier head that has a base assembly and a flexible membrane. The flexible membrane has a generally circular main portion with a lower surface that provides a substrate-mounting surface and a plurality of concentric annular portions extending from the main portion and secured to the base assembly. The volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers.

REFERENCES:
patent: 5851136 (1998-12-01), Lee
patent: 5964653 (1999-10-01), Perlov et al.
patent: 6159079 (2000-12-01), Zuniga et al.
patent: 6241593 (2001-06-01), Chen et al.
patent: 6390905 (2002-05-01), Korovin et al.
patent: 6422927 (2002-07-01), Zuniga

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