Multi beam scanning with bright/dark field imaging

Details Multi beam scanning with bright/dark field imaging Multi beam scanning with bright/dark field imaging

2006-05-23

2006-05-23

Niebling, John F. (Department: 2812)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

07049586

ABSTRACT:
Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.

REFERENCES:
patent: 5629768 (1997-05-01), Hagiwara
patent: 5892224 (1999-04-01), Nakasuji
patent: 5909276 (1999-06-01), Kinney et al.
patent: RE37740 (2002-06-01), Chadwick et al.

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