Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2008-07-01
2008-07-01
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S307000, C250S442110
Reexamination Certificate
active
07394076
ABSTRACT:
A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder but not much more. The perimeter of the recessed side has an air bearing surface separated from the recess by differentially pumped groves and seal lands. The air bearing lands are urged against a reference plate guide surface and the seal lands being substantially coplanar create a resistance to flow between the groves and recess, on the other side of the base reference plate mounts the radiation source. The VCS may operate in a vacuum environment itself, or in another preferred embodiment, it provides the possibility for multiple stages moving between process or inspection steps within the same tool or process sequence.
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Berman Jack I.
Blank Rome LLP
New Way Machine Components, Inc.
Smyth Andrew
LandOfFree
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