Mover device and semiconductor manufacturing apparatus and...

Details Mover device and semiconductor manufacturing apparatus and... Mover device and semiconductor manufacturing apparatus and...

2007-03-06

2007-03-06

Duda, Rina (Department: 2837)

Electricity: motive power systems

Linear-movement motors

C318S567000, C310S010000, C355S053000

Reexamination Certificate

active

10781756

ABSTRACT:
A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.

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