Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Patent
1989-01-23
1991-08-20
Braun, Leslie A.
Machine element or mechanism
Control lever and linkage systems
Multiple controlling elements for single controlled element
108143, 248661, 248913, 384 9, 384 12, H01L 2100
Patent
active
050404318
ABSTRACT:
In a movement guiding device, two parallel stationary guides are fixed to a surface plate and plural hydrostatic gas or bearing members are provided for the surface plate and the stationary guides. A Y stage is moved in a Y-axis direction under the influence of these bearing members. Additional hydrostatic gas or air bearing members are provided in relation to the surface plate and the Y stage so as to support an X stage for movement in an X-axis direction orthogonal to the Y-axis direction. Guide of the Y stage in the X-axis direction is made by the stationary guides on the surface plate, while guide thereof in a Z-axis direction perpendicular to an X-Y plane is made by the surface plate. Guide of the X stage in the Y-axis direction is made by the Y stage, while the guide thereof in the Z-axis direction is made by the surface plate, similar to the Y stage. With such structure, any vibration, rolling, or otherwise, of the Y stage is not transmitted to the X stage. Thus, high-precision guide is attainable. Linear motors are used as drive sources for the X and Y stages, so that all movable portions are provided by non-contact structures. Further, suitable brake members are used, which members are operable at a time of an accident of the stage. By this, accidental collision of the stage and/or derailment of the stage from the guide can be prevented.
REFERENCES:
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patent: 4615515 (1986-10-01), Suzuta et al.
patent: 4648723 (1987-03-01), Sugiyama et al.
patent: 4648724 (1987-03-01), Sugiyama et al.
patent: 4653408 (1987-03-01), Nagashima et al.
patent: 4744675 (1988-05-01), Sakino et al.
Horikoshi Michio
Inoue Mitsuru
Negishi Mahito
Ono Kazuya
Osanai Eiji
Anchell Scott
Braun Leslie A.
Canon Kabushiki Kaisha
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