Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate
2005-06-21
2005-06-21
Phan, James (Department: 2872)
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
C359S199200, C359S900000, C310S309000
Reexamination Certificate
active
06909530
ABSTRACT:
A movable microstructure is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.
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Phan James
PTS Corporation
Townsend and Townsend / and Crew LLP
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