Motorized support jack

Details Motorized support jack Motorized support jack

2000-05-10

2001-12-11

Watson, Robert C. (Department: 3723)

Implements or apparatus for applying pushing or pulling force

Wedge

Reexamination Certificate

active

06328282

ABSTRACT:

FIELD OF THE INVENTION
This invention relates to tools for supporting and lifting objects, and more particularly, to a vacuum compatible motorized jack that is suited for aligning photolithographic equipment used in the manufacture of integrated circuits.
BACKGROUND OF THE INVENTION
In general lithography refers to processes for pattern transfer between various media. Projection lithography is a powerful and essential tool for microelectronics processing.
FIG. 5
schematically depicts an apparatus for EUV lithography that comprises a radiation source
11
, such as a synchrotron or a laser plasma source, that emits x-rays
12
into condenser
13
which in turn emits beam
14
that illuminates a portion of reticle or mask
15
. The emerging patterned beam is introduced into the imaging optics
16
which projects an image of mask
15
, shown mounted on mask stage
17
, onto wafer
18
which is mounted on stage
19
. Element
20
, an x-y scanner, scans mask
15
and wafer
18
in such direction and at such relative speed as to accommodate the desired mask-to-image reduction. The positions of the various components of the projection lithography system must be adjusted from time to time to, among other things, account for long-term creep. Mechanisms must be in placed in the projection lithography system to accomplished this without incurring significant down time.
SUMMARY OF THE INVENTION
The present invention is directed to a compact motorized jack that can be employed in a vacuum system to support heavy loads and to adjust their positions. Specifically, in one embodiment, the invention is directed to a motorized jack for use in a vacuum environment that includes:
(a) a housing having a base;
(b) a first roller device that provides a first slidable surface and that is secured to the base;
(c) a second roller device that provides a second slidable surface and that has an upper surface;
(d) a wedge that is slidably positioned between the first roller device and the second roller device so that the wedge is in contact with the first slidable surface and the second slidable surface;
(e) a motor; and
(d) a drive mechanism that connects the motor and the wedge to cause the motor to controllably move the wedge forwards or backwards.
Individual motorized jacks can support and lift an object at an angle. Two or more motorized jacks can provide tip, tilt and vertical position adjustment capabilities.


REFERENCES:
patent: 4789133 (1988-12-01), Liaw
patent: 5172601 (1992-12-01), Siegrist et al.
patent: 5967728 (1999-10-01), Gales et al.
patent: 5992826 (1999-11-01), Simmonds
patent: 6042097 (2000-03-01), Ikawa et al.
patent: 6241214 (2001-06-01), Nisi et al.

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