Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1996-11-15
1998-02-10
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257374, 257397, 257401, 257404, H01L 2906
Patent
active
057172390
ABSTRACT:
In a MOS transistor device, the gate width is effectively enlarged without increasing the occupied area of the transistor by forming a plurality of rectangular grooves in the direction perpendicular to the gate width, and filling in these rectangular grooves with a gate electrode. Since these grooves are formed by anisotropic etching, there is no risk of contaminating the wafer.
Mintel William
NEC Corporation
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