Monomers, polymers, methods of synthesis thereof and...

Details Monomers, polymers, methods of synthesis thereof and... Monomers, polymers, methods of synthesis thereof and...

2006-04-04

2006-04-04

Ashton, Rosemary (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S326000, C430S908000

Reexamination Certificate

active

07022454

ABSTRACT:
The present invention provides novel alicyclic-esterified norbornene carboxylates monomers, polymers and photoresist compositions that comprise the polymers as a resin binder component. Methods for synthesis of the monomers and polymers of the invention are also provided. The photoresist compositions of the invention can provide highly resolved relief images upon exposure to short wavelengths, including sub-300 and sub-200 nm wavelengths such as 193 nm and 157 nm.

REFERENCES:
patent: 6147249 (2000-11-01), Watanabe et al.
patent: 6284429 (2001-09-01), Kinsho et al.
patent: 0 520 419 (1992-12-01), None
patent: 2 332 902 (1999-07-01), None

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