Monomer, polymer and composition for photoresist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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Details

C430S905000, C430S910000, C430S330000, C430S325000, C430S326000, C526S287000, C526S228000, C564S254000

Reexamination Certificate

active

07604919

ABSTRACT:
The photoresist monomer including an oxime group, a polymer thereof and a photoresist composition containing the same are disclosed. The photoresist monomer is represented by following Formula.In Formula, R* is independently a hydrogen or a methyl group, and R is a substituted or unsubstituted C1˜C25alkyl group with or without an ether group, or a substituted or unsubstituted C4˜C25hydrocarbon group including an aryl group, a heteroaryl group, a cycloalkyl group or a multicycloalkyl group with or without an ether group, a ketone group or a sulfur.

REFERENCES:
patent: 2004/0033440 (2004-02-01), Maeda et al.
patent: 2008/0102402 (2008-05-01), Lee et al.

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