Monolithic waveguide/MEMS switch

Details Monolithic waveguide/MEMS switch Monolithic waveguide/MEMS switch

2006-12-12

2006-12-12

Connelly-Cushwa, Michelle (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S001000, C385S014000

Reexamination Certificate

active

07149378

ABSTRACT:
A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.

REFERENCES:
patent: 5076654 (1991-12-01), Presby
patent: 6315462 (2001-11-01), Anthamatten et al.
patent: 6508561 (2003-01-01), Alie et al.
patent: 6697552 (2004-02-01), McGreer et al.
patent: 2002/0159701 (2002-10-01), Katayama et al.
patent: 2003/0095777 (2003-05-01), Janssen
patent: 2004/0022483 (2004-02-01), Staple et al.

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