Monolithic three-dimensional structures

Details Monolithic three-dimensional structures Monolithic three-dimensional structures

2006-03-14

2006-03-14

Lee, Hsien-ming (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S414000, C257S432000, C438S736000, C438S737000

Reexamination Certificate

active

07012291

ABSTRACT:
Three-dimensional structures of arbitrary shape are fabricated on the surface of a substrate through a series of processing steps wherein a monolithic structure is fabricated in successive layers. A first layer of photoresist material is spun onto a substrate surface and is exposed in a desired pattern corresponding to the shape of a final structure, at a corresponding cross-sectional level in the structure. The layer is not developed after exposure; instead, a second layer of photoresist material is deposited and is also exposed in a desired pattern. Subsequent layers are spun onto the top surface of prior layers and exposed, and upon completion of the succession of layers each defining corresponding levels of the desired structure, the layers are all developed at the same time leaving the three-dimensional structure.

REFERENCES:
patent: 4114257 (1978-09-01), Bellavance
patent: 4124270 (1978-11-01), Cheo
patent: 4851368 (1989-07-01), Behfar-Rad et al.
patent: 4924476 (1990-05-01), Behfar-Rad
patent: 4985374 (1991-01-01), Tsuji et al.
patent: 5030583 (1991-07-01), Beetz, Jr.
patent: 5132983 (1992-07-01), Behfar-Rad
patent: 5239600 (1993-08-01), Handa et al.
patent: 5275695 (1994-01-01), Chang et al.
patent: 5717251 (1998-02-01), Hayashi et al.
patent: 5741624 (1998-04-01), Jeng et al.
patent: 5764681 (1998-06-01), Ballantyne et al.
patent: 5824581 (1998-10-01), Tseng
patent: 5981367 (1999-11-01), Gonzalez
patent: 6252725 (2001-06-01), Tran et al.
patent: 6343171 (2002-01-01), Yoshimura et al.
patent: 6381013 (2002-04-01), Richardson
patent: 6384971 (2002-05-01), Faris
patent: 6452110 (2002-09-01), Clevenger et al.
patent: 6465157 (2002-10-01), Li et al.
patent: 2001/0016247 (2001-08-01), Matsuura et al.
Behafar-Rad, a.; Ballantyne, J.M.; Wong, S.S., “AlGaAs/GaAs-based triangular-shaped ring ridge lasers,” Applied Physics Letter, American Institute of Physics, vol. 60 (No. 14), p. 1658-1660. (Apr. 6, 1992).
Behfar-Rad, A.; Wong, S.S., “Monolithic AlGaAs-GaAs Single Quantum-Well Ridge Lasers Fabricated with Dry-Etched Facets and Ridges,” Journal of Quantum Electronics, IEEE, vol. 28 (No. 5), p. 1227-1231, (May 23, 1992).

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