Monolithic three dimensional array of charge storage devices...

Details Monolithic three dimensional array of charge storage devices... Monolithic three dimensional array of charge storage devices...

2005-04-19

2005-04-19

Weiss, Howard (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S074000, C438S239000

Reexamination Certificate

active

06881994

ABSTRACT:
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

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