Fishing – trapping – and vermin destroying
Patent
1995-01-03
1997-02-11
Thomas, Tom
Fishing, trapping, and vermin destroying
437 4, 250332, H01L 3109
Patent
active
056020430
ABSTRACT:
One or more thin film layers of material may be formed on an integrated circuit substrate and anisotropically etched to produce a monolithic thermal detector. A first layer of material may be placed on the integrated circuit substrate and anisotropically etched to form a plurality of supporting structures for the thermal sensors of the associated focal plane array. The thermal sensors of the focal plane array may be provided by anisotropically etching one or more thin film layers of material formed on the supporting structures. In an exemplary thermal detector, one of the thin film layers preferably includes pyroelectric material such as barium strontium titanate. A layer of thermal insulating material may be disposed between the integrated circuit substrate and the pyroelectric film layer to allow annealing of the pyroelectric film layer without causing damage to the associated integrated circuit substrate. In addition to the layer of insulating material, a heat sink may be disposed on the integrated circuit substrate opposite from the pyroelectric film layer to protect the integrated circuit substrate while annealing the pyroelectric film layer. Alternatively, a thermal isolation structure may be formed between the pyroelectric film layer and its associated supporting structures to allow annealing of the pyroelectric film layer without substantial heating of the underlying circuit substrate.
REFERENCES:
patent: 3846820 (1974-11-01), Lampe et al.
patent: 4018608 (1977-04-01), Frazier
patent: 4080532 (1978-03-01), Hopper
patent: 4142207 (1979-02-01), McCormack et al.
patent: 4143269 (1979-03-01), McCormack et al.
patent: 4162402 (1979-07-01), Hopper
patent: 4205227 (1980-08-01), Reed
patent: 4275302 (1981-06-01), Imbert et al.
patent: 4379232 (1983-04-01), Hopper
patent: 4593456 (1988-06-01), Cheung
patent: 4594507 (1986-06-01), Elliott et al.
patent: 4615595 (1986-10-01), Hornbeck
patent: 4705361 (1987-11-01), Frazier et al.
patent: 4710732 (1987-12-01), Hornbeck
patent: 4751387 (1988-06-01), Robillard
patent: 4956619 (1990-09-01), Hornbeck
patent: 4994672 (1991-02-01), Cross et al.
patent: 5010251 (1991-04-01), Grinberg et al.
patent: 5021663 (1991-06-01), Hornbeck
patent: 5036197 (1991-07-01), Voles
patent: 5047644 (1991-09-01), Meissner et al.
patent: 5051591 (1991-09-01), Trotta et al.
patent: 5061049 (1991-10-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5118944 (1992-06-01), Mori et al.
patent: 5196703 (1993-03-01), Keenan
patent: 5238530 (1993-08-01), Douglas et al.
patent: 5264326 (1993-11-01), Meissner et al.
patent: 5288649 (1994-02-01), Keenan
patent: 5293041 (1994-03-01), Kruse, Jr.
patent: 5367167 (1994-11-01), Keenan
patent: 5369280 (1994-11-01), Liddard et al.
patent: 5424544 (1995-06-01), Shelton et al.
patent: 5426304 (1995-06-01), Belcher
patent: 5457318 (1995-10-01), Robinson et al.
patent: 5485010 (1996-06-01), Owen et al.
patent: 5486698 (1996-06-01), Hanson et al.
patent: 5512748 (1996-04-01), Hanson
patent: 5521104 (1996-05-01), Walker
patent: 5523564 (1996-06-01), Yamada
Stanley Wolf, Richard N. Tauber, "Silicon Processing for the VLSI ERA, vol. 1: Process Technology" Lattice Press, Sunset Beach, California, pp. 57-58, 110-113.
R. A. Wodd, et al. "HIDAD--A Monolithic, Silicon, Uncooled Infrared Imaging Focal Plane Array," 16.5/Wood/HiDAD pp. 579-581.
J. F. Li, et al., "Temperature Sensitivity of the Reflectance Coefficient of SbSI," Ferroelectr. Lett. Sect. 1990, 12(1), 1-7.
J. Li, et al., "Temperature dependence of optical constants of MoS.sub.2 for Pyrooptical Devices," Appl. Opt. 1991 (30(13) 1583-4.
Beratan Howard R.
Hanson Charles M.
Carlson Brian A.
Donaldson Richard L.
Keterson James C.
Mulpuri S.
Texas Instruments Incorporated
LandOfFree
Monolithic thermal detector with pyroelectric film and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Monolithic thermal detector with pyroelectric film and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Monolithic thermal detector with pyroelectric film and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-341477