Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1989-11-13
1990-12-18
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156628, 156647, 156651, 156653, 156657, 1566591, 156662, H01L 21306, B44C 122, C03C 1500, C03C 2506
Patent
active
049784218
ABSTRACT:
The method of fabrication of a monolithic silicon membrane structure in which the membrane and its supporting framework are constructed from a single ultra thick body of silicon. The fabrication sequence includes the steps of providing a doped membrane layer on the silicon body, forming an apertured mask on the silicon body, and removal of an unwanted silicon region by mechanical grinding and chemical etching to provide a well opening in the silicon body terminating in the doped membrane.
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Bassous Ernest
Blum Joseph M.
Chan Kevin K.
Lamberti Angela C.
Lapadula Constantino
Goodwin John J.
International Business Machines - Corporation
Powell William A.
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