Monolithic silicon mass flow control structure

Details Monolithic silicon mass flow control structure Monolithic silicon mass flow control structure

1999-07-23

2000-09-26

Clark, Sheila V.

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

257723, 257706, 257714, H01L 2302, H01L 2310, H01L 2334

Patent

active

061246328

ABSTRACT:
A monolithic silicon mass flow control structure is made by etching process to form a valve structure and a channel in a silicon chip, laser or electric discharge process to form a flow inlet and a flow outlet in a glass chip, and anode connection process to combine the silicon chip and the glass chip. At least a flow sensing element and a micro valve control element are disposed above the channel and the valve structure respectively for flow sensing and control purposes. A semi-complete product is sealed on a base board, wherein an output signal from the flow sensing element is compared with a pre-set value in an externally connected control circuit, which will change heating condition so as to control flow of the valve structure.

REFERENCES:
patent: 4977443 (1990-12-01), Kobayashi et al.
patent: 5239443 (1993-08-01), Fahey et al.
patent: 5329160 (1994-07-01), Miura et al.
patent: 5349831 (1994-09-01), Daikoku et al.
patent: 5705850 (1998-01-01), Ashiwake et al.
patent: 5719444 (1998-02-01), Tilton et al.
patent: 5774334 (1998-06-01), Kawamura et al.
patent: 5959351 (1999-09-01), Sasaki et al.

Affiliated with

Also associated with

Rating

Monolithic silicon mass flow control structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Monolithic silicon mass flow control structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Monolithic silicon mass flow control structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2102516