Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1989-12-21
1990-12-25
Stephan, Steven L.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
73517AV, 73DIG1, 310 25, 310323, 310324, 310338, H01L 4104, G01P 1509
Patent
active
049805983
ABSTRACT:
A monolithic resonator for a vibrating beam accelerometer is provided which comprises an outer structure including a mounting structure, a proof mass structure, a plurality of flexure beams extending between the mounting and proof mass structures; and an inner structure including first and second isolator masses, first and second isolator beams connected to one portion of the isolator masses, respectively, and a vibrating beam extending between other portions of the isolator masses. The monolithic resonator is non-planar in that the outer structure has a thickness greater than said inner structure.
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Dougherty Thomas M.
Lucas Schaevitz Inc.
Stephan Steven L.
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