Monolithic microwave integrated circuit having vertically stacke

Details Monolithic microwave integrated circuit having vertically stacke Monolithic microwave integrated circuit having vertically stacke

1988-07-18

1990-11-06

Yarcza, Thomas H.

Wave transmission lines and networks

Automatically controlled systems

With control of equalizer and/or delay network

333279, 357 51, 357 61, 357 89, 505856, H01L 2980

Patent

active

049690329

ABSTRACT:
A monolithic microwave integrated circuit having multiple, vetically stacked components wherein at least three metal layers isolated from each other by layers of non-conducting material are formed on a semi-insulating substrate, generally comprised of gallium arsenide. Vertically stacked capacitors, inductors and various combinations thereof may be fabricated using the present invention. Further, the vetrically stacked components may be formed on active devices such as FETs and diodies.

REFERENCES:
patent: 4737733 (1988-04-01), LaPrade
patent: 4745448 (1988-05-01), VanRees et al.

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