Monolithic MEMS and integrated circuit device having a...

Details Monolithic MEMS and integrated circuit device having a... Monolithic MEMS and integrated circuit device having a...

2011-01-04

2011-01-04

Toledo, Fernando L (Department: 2895)

Active solid-state devices (e.g., transistors, solid-state diode

With shielding

With means to shield device contained in housing or package...

C257S414000, C257S499000, C438S149000, C438S606000

Reexamination Certificate

active

07863714

ABSTRACT:
An integrated circuit device includes a semiconductor die, the semiconductor die including a semiconductor substrate, driving/control circuitry disposed along a peripheral region of the semiconductor die, a MEMS device disposed within a central region of the semiconductor die, and a barrier disposed between the driving/control circuitry and the MEMS device.

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