4. Active solid-state devices (e.g., transistors, solid-state diode
  5. With shielding
  6. With means to shield device contained in housing or package...

Akustica, Inc.

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Methods for trapping charge in a microelectromechanical...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Monolithic MEMS and integrated circuit device having a...

Active solid-state devices (e.g. – transistors – solid-state diode – With shielding – With means to shield device contained in housing or package...
Reexamination Certificate

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Multi-metal layer MEMS structure and process for making the...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Multi-metal layer MEMS structure and process for making the...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Process for forming and acoustically connecting structures...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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