Monolithic inkjet printhead

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

156653, 156656, 156657, 1566591, H01L 21306, B44C 122, C03C 1500, C23F 100

Patent

active

052118061

ABSTRACT:
The present invention is directed to a method for fabricating a monolithic ink jet printhead. The printhead has a substrate with a major surface and a plurality of ink channels formed on the major surface, with the ink channels each having a nozzle at one end and an inlet communicating with an ink manifold at the other end. The printhead has transducers, formed on the major surface and positioned in each ink channel, for creating pressure to move ink through the nozzles. According to the method, first a mandrel of a first metal or metal alloy is formed, on the major surface, that models the ink channels and the ink manifold. Then a first passivation layer is formed on the mandrel and the major surface, and a mandrel cover of a first metal or metal alloy is formed covering the mandrel, separated from the mandrel by the first passivation layer. A nozzle cap is formed over and attached to the mandrel cover by plating the mandrel cover with a third metal or metal alloy. The nozzle cap includes openings or orifices that are substantially coaxially with the transducers. Finally, the mandrel is removed, leaving a void that defines the ink channels and the ink manifold, and leaving the portions of the first passivation layer adjacent to the mandrel cover to protect the mandrel cover from the corrosive effects of ink.

REFERENCES:
patent: 4394670 (1983-07-01), Sugitani et al.
patent: 4438191 (1984-03-01), Cloutier
patent: 4536250 (1985-08-01), Ikeda et al.
patent: 4558333 (1985-12-01), Sugitani et al.
patent: 4701766 (1987-10-01), Sugitani et al.
patent: 5140345 (1992-08-01), Komuro

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