Monolithic inductor with guard rings

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

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336 83, H01L 2900, H01F 2702

Patent

active

061603031

ABSTRACT:
An integrated circuit and method of fabrication are disclosed for achieving electrical isolation between a spiral inductor and an underlying silicon substrate using standard semiconductor manufacturing process flow. A spiral conductor with square windings is formed in metal layer (20) patterned so that straight runs of successive turns (22, 23, 24) overlie corresponding runs of concentric square rings (16, 17, 18) formed in underlying metal layer (14). A unity gain voltage buffer (30) connects each ring (16, 17, 18) with a respective overlying turn (22, 23, 24).

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patent: 5539241 (1996-07-01), Abidi et al.
patent: 5559360 (1996-09-01), Chiu et al.
patent: 5583474 (1996-12-01), Mizoguchi et al.
Large Suspended Inductors on Silicon and Their Use in a 2-.mu.m CMOS RF Amplifier, Chang et al., IEEE Electron Device Letters, vol. 14, No. 5, May, 1993, pp. 246-248.

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