Metal treatment – Barrier layer stock material – p-n type – With non-semiconductive coating thereon
Patent
1990-06-01
1993-04-27
Hearn, Brian E.
Metal treatment
Barrier layer stock material, p-n type
With non-semiconductive coating thereon
156612, 437126, 148DIG58, H01L 2912
Patent
active
052058719
ABSTRACT:
A monocrystalline germanium film is grown on a sapphire substrate with a (1102) orientation. The substrate is first pretreated to restructure the (1102) surface plane. Typically, restructuring is accomplished by either an anneal at high temperature or ion bombardment. A monocrystalline germanium layer is grown on the pretreated surface by a vapor deposition process such as molecular beam epitaxy or chemical vapor deposition.
REFERENCES:
patent: 3753775 (1973-08-01), Robinson et al.
patent: 4529455 (1985-07-01), Bean et al.
patent: 5091333 (1992-02-01), Fan et al.
D. J. Dumin "Growth and Properties of Thin Germanium Films" J. Electrochem. oc.: Solid State Science vol. 117, No. 1, pp. 95-100, Jan. 1970.
D. J. Godbey, et al "Single-crystal germanium grown on (1102) sapphire by molecular beam epitaxy" Appl. Phys. Lett. 54(24), 12 Jun. 1989 pp. 2449-2451.
D. J. Godbey, et al "MBE-Grown Germanium on Sapphire (1102)" Thin Solid Films, 184 (1990) pp. 379-386.
R. F. Tramposch, "Epitaxial Films of Germanium Deposited on Sapphire via Chemical Vapor Transport" J. Electrochem. Soc. & Solid State Science vol. 116, No. 5 pp. 654-658 (1969).
R. F. Tramposch, "Heteroepitaxial Films of Germanium on Sapphire" Applied Physics Letters vol. 9, No. 2, 15 Jul. 1966, pp. 83-84.
Godbey David J.
Qadri Syed B.
Edelberg Barry A.
Fleck Linda J.
Hearn Brian E.
McDonnell Thomas E.
The United States of America as represented by the Secretary of
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